The growth of AlGaN/GaN HEMT structures in large scale Planetary Reactors such as the AIX 2600G3 HT in 8x4 inch configuration | Schoen | EWMOVPEX. 10th European Workshop on Metalorganic Vapour Phase Epitaxy

The growth of AlGaN/GaN HEMT structures in large scale Planetary Reactors such as the AIX 2600G3 HT in 8x4 inch configuration

Oliver Schoen, Assadullah Alam, Bernd Schineller, Michael Heuken

DOI Code: 10.1285/i9788883050088p367

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