Modeling analysis of GaN/InGaN deposition in MOCVD vertical rotating disk reactors | Kadinski | EWMOVPEX. 10th European Workshop on Metalorganic Vapour Phase Epitaxy

Modeling analysis of GaN/InGaN deposition in MOCVD vertical rotating disk reactors

L. Kadinski, V. Merai, A. Parekh, J. Ramer, E. Armour, R. Stall, A. Gurary, A. Galyukov, Yu. Makarov

DOI Code: 10.1285/i9788883050088p311

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